Number of the records: 1
Practical Use of Scanning Low Energy Electron Microscope (SLEEM)
- 1.
SYSNO ASEP 0465457 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Ostatní články Title Practical Use of Scanning Low Energy Electron Microscope (SLEEM) Author(s) Müllerová, Ilona (UPT-D) RID, SAI, ORCID
Mikmeková, Eliška (UPT-D) RID
Mikmeková, Šárka (UPT-D) RID, SAI, ORCID
Konvalina, Ivo (UPT-D) RID, ORCID, SAI
Frank, Luděk (UPT-D) RID, SAI, ORCIDNumber of authors 5 Source Title Microscopy and Microanalysis. - : Cambridge University Press - ISSN 1431-9276
Roč. 22, S3 (2016), s. 1650-1651Number of pages 2 s. Publication form Print - P Language eng - English Country US - United States Keywords scanning low energy ; SLEEM Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects TE01020118 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support UPT-D - RVO:68081731 DOI 10.1017/S1431927616009090 Annotation The high negative bias of a sample in a scanning electron microscope constitutes the cathode lens (CL), with a strong electric field just above the sample surface [1] offers a tool for controlling the landing
energy of electrons down to units or even fractions of electronvolts. Moreover, the field accelerates and collimates the signal electrons to earthed detectors above and below the sample, thereby assuring high
collection efficiency and high amplification of the image signal. One important feature is the ability to acquire the complete emission of the backscattered electrons, including those emitted at high angles with respect to the surface normal. The cathode lens aberrations are proportional to the landing energy of electrons, so the spot size becomes nearly constant throughout the full energy scale.Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2017
Number of the records: 1