Parameter Optimization of Multi-Level Diffraction Gratings

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SYSNO	0464388
Title	Parameter Optimization of Multi-Level Diffraction Gratings
Author(s)	Matějka, Milan (UPT-D)_{RID, ORCID, SAI} Kolařík, Vladimír (UPT-D)_{RID, ORCID, SAI} Horáček, Miroslav (UPT-D)_{RID, ORCID, SAI} Král, Stanislav (UPT-D)_{RID, SAI}
Source Title	NANOCON 2016. 8th International Conference on Nanomaterials - Research and Application. Conference Proceedings. S. 751-756. - Ostrava : Tanger, 2017
Conference	NANOCON 2016. International Conference on Nanomaterials - Research and Application /8./, 19.10.2016 - 21.10.2016, Brno
Document Type	Konferenční příspěvek (zahraniční konf.)
Grant	FR-TI1/576 GA MPO - Ministry of Industry and Trade (MPO)
	TE01020233 GA TA ČR - Technology Agency of the Czech Republic (TA ČR)
	LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
	ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
Institutional support	UPT-D - RVO:68081731
Language	eng
Country	CZ
Keywords	e-beam pattern generator * variable shaped beam * grayscale lithography * multi-level grating
Permanent Link	http://hdl.handle.net/11104/0270769

Number of the records: 1