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Effect of plasma composition on nanocrystalline diamond layers deposited by a microwave linear antenna plasma-enhanced chemical vapour deposition system
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SYSNO 0454568 Title Effect of plasma composition on nanocrystalline diamond layers deposited by a microwave linear antenna plasma-enhanced chemical vapour deposition system Author(s) Taylor, Andrew (FZU-D) RID, ORCID
Ashcheulov, Petr (FZU-D) ORCID, RID
Čada, Martin (FZU-D) RID, ORCID, SAI
Fekete, Ladislav (FZU-D) RID, ORCID
Hubík, Pavel (FZU-D) RID, ORCID
Klimša, Ladislav (FZU-D) ORCID
Olejníček, Jiří (FZU-D) RID, ORCID
Remeš, Zdeněk (FZU-D) RID, ORCID
Jirka, Ivan (UFCH-W) RID, ORCID
Janíček, P. (CZ)
Bedel-Pereira, E. (FR)
Kopeček, Jaromír (FZU-D) RID, ORCID
Mistrík, J. (CZ)
Mortet, Vincent (FZU-D) RID, ORCIDSource Title Physica Status Solidi A : Applications and Materials Science. Roč. 212, č. 11 (2015), s. 2418-2423. - : Wiley Document Type Článek v odborném periodiku Grant GA13-31783S GA ČR - Czech Science Foundation (CSF) CZ.2.16/3.1.00/21568, XE - EU countries LO1409 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support FZU-D - RVO:68378271 ; UFCH-W - RVO:61388955 Language eng Country DE Keywords diamond * electrical conductivity * nanocrystalline materials * optical emission spectroscopy * plasma enhanced chemical vapour deposition * SiC Permanent Link http://hdl.handle.net/11104/0255231
Number of the records: 1