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Effect of plasma composition on nanocrystalline diamond layers deposited by a microwave linear antenna plasma-enhanced chemical vapour deposition system
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SYSNO ASEP 0454568 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Effect of plasma composition on nanocrystalline diamond layers deposited by a microwave linear antenna plasma-enhanced chemical vapour deposition system Author(s) Taylor, Andrew (FZU-D) RID, ORCID
Ashcheulov, Petr (FZU-D) ORCID, RID
Čada, Martin (FZU-D) RID, ORCID, SAI
Fekete, Ladislav (FZU-D) RID, ORCID
Hubík, Pavel (FZU-D) RID, ORCID
Klimša, Ladislav (FZU-D) ORCID
Olejníček, Jiří (FZU-D) RID, ORCID
Remeš, Zdeněk (FZU-D) RID, ORCID
Jirka, Ivan (UFCH-W) RID, ORCID
Janíček, P. (CZ)
Bedel-Pereira, E. (FR)
Kopeček, Jaromír (FZU-D) RID, ORCID
Mistrík, J. (CZ)
Mortet, Vincent (FZU-D) RID, ORCIDSource Title Physica Status Solidi A : Applications and Materials Science. - : Wiley - ISSN 1862-6300
Roč. 212, č. 11 (2015), s. 2418-2423Number of pages 6 Language eng - English Country DE - Germany Keywords diamond ; electrical conductivity ; nanocrystalline materials ; optical emission spectroscopy ; plasma enhanced chemical vapour deposition ; SiC Subject RIV BM - Solid Matter Physics ; Magnetism R&D Projects GA13-31783S GA ČR - Czech Science Foundation (CSF) LO1409 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support FZU-D - RVO:68378271 ; UFCH-W - RVO:61388955 UT WOS 000366588100006 EID SCOPUS 84934342494 DOI 10.1002/pssa.201532183 Annotation The addition of CO2 into the process gas has a significant impact on the quality and the incorporation of boron in CVD diamond layers. In this report we study the effect of CO2 addition in the gas phase on the properties of boron doped nano-crystalline diamond (BNCD) layers grown at low substrate temperatures (450–500 °C) using a microwave linear antenna plasma-enhanced chemical vapour deposition apparatus (MW-LA-PECVD). Experimental results show an increase in the layers' conductivity with a reduction in CO2 concentration, which is consistent with the variation in the atomic boron emission line intensity measured by optical emission spectroscopy (OES). At CO2 concentrations close to zero, we observed the formation of a smooth, transparent and highly resistive layer on unseeded substrates. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2016
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