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Effect of plasma composition on nanocrystalline diamond layers deposited by a microwave linear antenna plasma-enhanced chemical vapour deposition system
- 1.TAYLOR, A., ASHCHEULOV, P., ČADA, M., FEKETE, L., HUBÍK, P., KLIMŠA, L., OLEJNÍČEK, J., REMEŠ, Z., JIRKA, I., JANÍČEK, P., BEDEL-PEREIRA, E., KOPEČEK, J., MISTRÍK, J., MORTET, V. Effect of plasma composition on nanocrystalline diamond layers deposited by a microwave linear antenna plasma-enhanced chemical vapour deposition system. Physica Status Solidi A. 2015, 212(11), 2418-2423. ISSN 1862-6300. E-ISSN 1862-6319. Available: doi: 10.1002/pssa.201532183
Number of the records: 1