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Effect of plasma composition on nanocrystalline diamond layers deposited by a microwave linear antenna plasma-enhanced chemical vapour deposition system
- 1.TAYLOR, Andrew, ASHCHEULOV, Petr, ČADA, Martin, FEKETE, Ladislav, HUBÍK, Pavel, KLIMŠA, Ladislav, OLEJNÍČEK, Jiří, REMEŠ, Zdeněk, JIRKA, Ivan, JANÍČEK, P., BEDEL-PEREIRA, E., KOPEČEK, Jaromír, MISTRÍK, J., MORTET, Vincent. Effect of plasma composition on nanocrystalline diamond layers deposited by a microwave linear antenna plasma-enhanced chemical vapour deposition system. Physica Status Solidi A. 2015, 212(11), 2418-2423. ISSN 1862-6300. E-ISSN 1862-6319. Available: doi: 10.1002/pssa.201532183
Number of the records: 1