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Exposure Time Comparison between E-beam Writer with Gaussian Beam and Variable Shaped Beam
- 1.Horáček, M., Krátký, S., Urbánek, M., Kolařík, V., Meluzín, P., Matějka, M., Chlumská, J. Exposure Time Comparison between E-beam Writer with Gaussian Beam and Variable Shaped Beam. In: NANOCON 2014. 6th International conference proceedings. Ostrava: TANGER, 2014. ISBN 978-80-87294-55-0.
Number of the records: 1