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Ultra-fast three dimensional microanalysis using the scanning electron microscope equipped with xenon plasma focused ion beam
- 1.0432741 - FZÚ 2015 eng A - Abstract
Dluhoš, J. - Petrenec, M. - Peřina, P. - Reinauer, F. - Kopeček, Jaromír - Hrnčíř, T. - Jiruše, J.
Ultra-fast three dimensional microanalysis using the scanning electron microscope equipped with xenon plasma focused ion beam.
Proceedings of 18th International Microscopy Congress. Prague: Czechoslovak Microscopy Society, 2014 - (Hozák, P.). ISBN 978-80-260-6721-4.
[International Microscopy Congress /18./. 07.09.2014-12.09.2014, Prague]
Institutional support: RVO:68378271
Keywords : SEM * FIB * xenon
Subject RIV: BM - Solid Matter Physics ; Magnetism
Permanent Link: http://hdl.handle.net/11104/0237116
Number of the records: 1