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Direct growth of sub-micron diamond structures
- 1.0377642 - FZÚ 2013 RIV GB eng J - Journal Article
Babchenko, Oleg - Verveniotis, Elisseos - Hruška, Karel - Ledinský, Martin - Kromka, Alexander - Rezek, Bohuslav
Direct growth of sub-micron diamond structures.
Vacuum. Roč. 86, č. 6 (2012), s. 693-695. ISSN 0042-207X. E-ISSN 1879-2715
R&D Projects: GA AV ČR KAN400100701; GA AV ČR(CZ) IAAX00100902
Institutional research plan: CEZ:AV0Z10100521
Keywords : diamond structuring * electron beam lithography * selected-area deposition
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 1.530, year: 2012
Well-defined diamond channels (in widths from 5 µm down to 250 nm) were realized by selected area deposition applying optical and electron beam lithography for polymer structuring. The realized diamond channels were electrically active (reveal surface conductivity).
Permanent Link: http://hdl.handle.net/11104/0209745
Number of the records: 1