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Standing Wave Interferometer with Stabilization of Wavelength on Air
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SYSNO ASEP 0368388 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Standing Wave Interferometer with Stabilization of Wavelength on Air Author(s) Lazar, Josef (UPT-D) RID, ORCID, SAI
Číp, Ondřej (UPT-D) RID, SAI, ORCID
Čížek, Martin (UPT-D) RID, ORCID, SAI
Hrabina, Jan (UPT-D) RID, ORCID, SAI
Buchta, Zdeněk (UPT-D) RID, SAI, ORCIDNumber of authors 5 Source Title tm-Technisches Messen - ISSN 0171-8096
Roč. 78, č. 11 (2011), s. 484-488Number of pages 5 s. Language eng - English Country DE - Germany Keywords refractometry ; nanopositioning ; interferometry ; nanometrology Subject RIV BH - Optics, Masers, Lasers R&D Projects GA102/09/1276 GA ČR - Czech Science Foundation (CSF) GPP102/11/P820 GA ČR - Czech Science Foundation (CSF) KAN311610701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) LC06007 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) CEZ AV0Z20650511 - UPT-D (2005-2011) UT WOS 000297711400002 EID SCOPUS 80055095667 DOI 10.1524/teme.2011.0201 Annotation We present an experimental arrangement of an interferometric system designed to operate with full compensation for varying refractive index of air in the measuring axis. The concept is based on a principle where the wavelength of the laser source is derived not from an optical frequency of the stabilized laser but from a fixed length being a base-plate or a frame of the whole measuring setup. This results into stabilization of the wavelength of the laser source in atmospheric conditions to mechanical length of suitable etalon made of a material with very low thermal expansion. The ultra-low thermal expanding glass ceramic materials available on the market perform thermal expansion coefficients on the level 10-8 which significantly exceeds the limits of uncertainty posed by indirect evaluation of refractive index of air through Edlen formula. This approach represents a contribution primarily to high-resolution and high-precision dimensional metrology in the nanoscale. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2012
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