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Evaluation of mechanical properties of DLC layers using the resonant ultrasound spectroscopy and AFM tip
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SYSNO ASEP 0356884 Document Type A - Abstract R&D Document Type The record was not marked in the RIV R&D Document Type Není vybrán druh dokumentu Title Evaluation of mechanical properties of DLC layers using the resonant ultrasound spectroscopy and AFM tip Author(s) Kocourek, Tomáš (FZU-D) RID, ORCID, SAI
Růžek, Michal (UT-L)
Landa, Michal (UT-L) RID
Jelínek, Miroslav (FZU-D) RID, ORCID
Remsa, Jan (FZU-D) RID, ORCIDSource Title Twelfth International Conference on Plasma Surface Engineering. - Dresden : Europäische Forschungsgesellschaft Dünne Schichten e.V. (EFDS), 2010 - ISBN N
S. 572Number of pages 1 s. Action International Conference on Plasma Surface Engineering /12./ Event date 13.09.2010-17.09.2010 VEvent location Garmisch-Partenkirchen Country DE - Germany Event type EUR Language eng - English Country DE - Germany Keywords resonant ultrasound spectroscopy ; pulsed laser deposition ; diamond-like carbon ; thin layer ; AFM nanoindentation Subject RIV BM - Solid Matter Physics ; Magnetism R&D Projects GA101/09/0702 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z10100522 - FZU-D (2005-2011) AV0Z20760514 - UT-L (2005-2011) Annotation Mechanical properties of diamond-like carbon (DLC) layers with gradient carbon-silicon interlayer were studied. The DLC layers were prepared by pulsed laser deposition and 30 nm thick SiC buffer layer by combination of PLD and DC magnetron sputtering. Dynamical mechanical properties were studied by newly developed method of resonant ultrasound spectroscopy (RUS) and results were compared with quasi-statical quantities - Young’s modulus and hardness, obtained by nanoindentation using AFM tip. RUS evaluates the elastic coefficients from resonant frequency shifts caused by deposition of the surface layer on the known substrate. We obtained elastic constants of the film dominantly from in-plane vibration. Whereas the static local effective Young modulus in the direction perpendicular to the surface is the result of nanoindentation technique. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2011
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