Study of processes in a pulsed magnetron Ar/O.sub.2./sub. plasma by mass spectrometry

0324133 - FZÚ 2009 RIV GR eng C - Conference Paper (international conference)
Pokorný, Petr - Novotný, Michal - Bulíř, Jiří - Lančok, Ján - Mišina, Martin - Musil, Jindřich
Study of processes in a pulsed magnetron Ar/O₂ plasma by mass spectrometry.
[Studium procesů v pulsním magnetronovém Ar/O₂ plazmatu pomocí hmotnostní spektrometrie.]
35th EPS Conference on Plasma Physics – Contributed papers. Paris: European Physical Society, 2008 - (Lalousis, P.; Moustaizis, S.), P5.142 /1-P5.142 /4. ECA, 32D. ISBN 2-914771-52-5.
[EPS Plasma Physics Conference /35./. Hersonissos (GR), 09.06.2008-13.06.2008]
R&D Projects: GA AV ČR KAN400100653
Institutional research plan: CEZ:AV0Z10100522
Keywords : magnteron sputtering * mass spectrometry * alumina
Subject RIV: BM - Solid Matter Physics ; Magnetism

We studied plasma processes during sputtering of aluminum target in a reactive oxygen/argon atmosphere in two radial positions. The partial pressure of oxygen was systematically changed keeping the total pressure constant (0.5 Pa). A whole target-poisoning cycle was analyzed with a special attention to unstable transition from dielectric to metallic mode. Our attention was focused to appearance of positive O+, O2+, Al +and AlO+ ions. In the radial direction in front of race-track we observed energetic negative ions of O-, O2- and weak ALO- while in the central position the negative ions disappeared. The transition from dielectric to metallic mode is followed by atomic oxygen ions decrease, while the molecular oxygen ions completely disappear from the spectra in the transition mode. The observed plasma behavior was assigned to a mechanism of the film formation.

Studium procesů v plazmatu během magnetronového odprašování hliníkového terče v reaktivní kyslík/argonové atmosféře ve dvou různých radiálních polohách. Byl analyzován celý cyklus "otravy" terče, kdy pozornost byla věnována nestabilní oblasti přechodu z dielektrického do kovového módu. Byl sledován výskyt a chování O+, O2+, Al+ a AlO+ iontů. Mimo radiální osu byly detekovány záporné ionty O-, O2- a slabě ALO-.
Permanent Link: http://hdl.handle.net/11104/0171912