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Combined detector for BSE, SE and BSE+SE detection in a low voltage SEM
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SYSNO ASEP 0205508 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Combined detector for BSE, SE and BSE+SE detection in a low voltage SEM Author(s) Autrata, Rudolf (UPT-D)
Jirák, Josef (UPT-D) RID
Romanovský, Vladimír (UPT-D)
Špinka, Jiří (UPT-D)Source Title Proceedings of the 8th international seminar, held in Skalský dvůr / Frank L.. - Brno : Ústav přístrojové techniky Akademie věd České republiky, 2002 - ISBN 80-238-8986-9 Pages s. 49 - 50 Number of pages 2 s. Action Recent trends in charged particle optics and surface physics instrumentation Event date 08.07.2002-12.07.2002 VEvent location Skalský dvůr Country CZ - Czech Republic Event type WRD Language eng - English Country CZ - Czech Republic Keywords low accelerating voltage ; electrons beam ; Everhart-Thornley Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects GA102/01/1271 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z2065902 - UPT-D Annotation Specimen observation at a low accelerating voltage of the electron beam (around 1kV) is a new and attractive technique of scanning electron microscopy. While detection to the signal of secondary electrons (SE) with the help of the scintillation-photomultiplier system described by Everhart-Thornley does not depend on the primary beam energy, the detection of backscattered electrons (BSE), having their energy only a bit lower than energy of the beam, is limited by a low sensitivity of semiconductor or channel plate detectors to channel plate detectors to electrons of energy below 2 keV. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2003
Number of the records: 1