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Ultrahigh vacuum scanning low energy electron microscope (UHV SLEEM) for surface studies
- 1.0205487 - UPT-D 20020037 RIV CZ eng C - Conference Paper (international conference)
Müllerová, Ilona - Frank, Luděk
Ultrahigh vacuum scanning low energy electron microscope (UHV SLEEM) for surface studies.
Proceedings of the 2nd annual meeting of the Czechoslovak microscopy society. Brno: CSMS, 2002 - (Frank, L.), s. 79 - 82. ISBN 80-238-8749-1.
[CSEM. Vranovská Ves (CZ), 08.02.2002-09.02.2002]
R&D Projects: GA AV ČR IAA1065901
Institutional research plan: CEZ:AV0Z2065902
Keywords : UHV SLEEM
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
The aim of project is to study clean and well-defined surfaces via interaction of electrons at energies from 0 to 25 keV with a high spatial resolution. During the period 1995-2001 we have built an Ultrahigh Vacuum Scanning Low Energy Electron Microscope for surface studies. The image resolution below 50 nm can be achieved at 10 eV. The residual pressure in the specimen vicinity is 10-10 mbar. The paper briefly describes main parameters of the instrument.
Permanent Link: http://hdl.handle.net/11104/0101100
Number of the records: 1