Influence of Size of Ionization Detector Electrode on Signal Detection in Environmental Conditions

0205409 - UPT-D 20010049 RIV IT eng C - Conference Paper (international conference)
Jirák, Josef - Autrata, Rudolf - Drnovský, Radek
Influence of Size of Ionization Detector Electrode on Signal Detection in Environmental Conditions.
Proceedings of 5th Multinational Congress on Electron Microscopy. Lecce: Rinton Press, 2001 - (Dini, L.; Catalano, M.), s. 523-524. ISBN 1-58949-003-7.
[MCEM '01 /5./ - Multinational Congress on Electron Microscopy. Lecce (IT), 20.09.2001-25.09.2001]
R&D Projects: GA AV ČR IBS2065107
Institutional research plan: CEZ:AV0Z2065902
Keywords : environmental scanning electron microscopy * ionization detector
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

Environmental scanning electron microscopy enables observation of samples in environment with elevated pressure. Ionization detector is one of several types of detectors used at conditions of higher pressure in the specimen chamber. It detects signal of secondary and backscattered electrons. Its circular electrode is placed above the specimen and creates an electrostatic field in the space between specimen and detector. Signal of electrons is amplified in this field in the process of impact ionization and is detected by this electrode.
Permanent Link: http://hdl.handle.net/11104/0101023