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Complex study of mechanical properties of a-Si : H and a-SiC : H boron doped films
- 1.0044051 - ÚFM 2007 RIV NL eng J - Journal Article
Buršíková, V. - Sládek, P. - Sťahel, P. - Buršík, Jiří
Complex study of mechanical properties of a-Si : H and a-SiC : H boron doped films.
[Komplexní studium mechanických vlastností a-Si : H and a-SiC : H vrstev dopovaných borem.]
Journal of Non-Crystalline Solids. Roč. 352, 9-20 (2006), s. 1238-1241. ISSN 0022-3093. E-ISSN 1873-4812
R&D Projects: GA ČR(CZ) GA106/05/0274
Institutional research plan: CEZ:AV0Z20410507
Keywords : amorphous semiconductors * mechanical properties * hardness
Subject RIV: BL - Plasma and Gas Discharge Physics
Impact factor: 1.362, year: 2006
Complex study of mechanical properties of a-Si : H and a-SiC : H boron doped films.
Komplexní studium mechanických vlastností a-Si : H and a-SiC : H vrstev dopovaných borem.
Permanent Link: http://hdl.handle.net/11104/0136921
Number of the records: 1