ŠILHAN, Lukáš, NOVOTNÝ, Jan, PLICHTA, Tomáš, JEŽEK, Jan, VACULÍK, Ondřej, ŠERÝ, Mojmír. Design of Setup for Laser Induced Plasma Etching. In: 2024 37th International Vacuum Nanoelectronics Conference, IVNC 2024. New York: IEEE, 2024, s. 44-45. ISBN 979-8-3503-7977-8. ISSN 2164-2370. Available: https://doi.org/10.1109/IVNC63480.2024.10652276.