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Optically modified second harmonic generation in silicon oxynitride thin films via local layer heating
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SYSNO ASEP 0578067 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Optically modified second harmonic generation in silicon oxynitride thin films via local layer heating Author(s) Lukeš, Jakub (UFP-V)
Kanclíř, Vít (UFP-V)
Václavík, Jan (UFP-V) RID
Melich, Radek (UFP-V) RID
Fuchs, U. (DE)
Žídek, Karel (UFP-V) ORCIDNumber of authors 6 Article number 8658 Source Title Scientific Reports. - : Nature Publishing Group - ISSN 2045-2322
Roč. 13, č. 1 (2023)Number of pages 8 s. Language eng - English Country US - United States Keywords silicon nitride ; strong second harmonic generation ; thin films Subject RIV JK - Corrosion ; Surface Treatment of Materials OECD category Coating and films R&D Projects EF16_026/0008390 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) GA23-08020S GA ČR - Czech Science Foundation (CSF) Method of publishing Open access Institutional support UFP-V - RVO:61389021 UT WOS 000999237500015 EID SCOPUS 85160327399 DOI 10.1038/s41598-023-35593-8 Annotation Strong second harmonic generation (SHG) in silicon nitride has been extensively studied—among others, in terms of laser-induced SHG enhancement in Si3N4 waveguides. This enhancement has been ascribed to the all-optical poling induced by the coherent photogalvanic effect. Yet, an analogous process for Si3N4 thin films has not been reported. Our article reports on the observation of laser-induced threefold SHG enhancement in Si3N4 thin films. The observed enhancement has many features similar to all-optical poling, such as highly nonlinear power dependence, cumulative effect, or connection to the Si3N4–Si interface. However, identical experiments for low-oxygen silicon oxynitride thin films lead to complex behavior, including laser-induced SHG reduction. Following a thorough experimental study, including the effects of repetition rate or pulse length, the observed results were ascribed to heat-induced SHG variation. In addition to revealing a new mechanism of laser-induced SHG variation, our results also provide a means to identify this mechanism. Workplace Institute of Plasma Physics Contact Vladimíra Kebza, kebza@ipp.cas.cz, Tel.: 266 052 975 Year of Publishing 2024 Electronic address https://www.nature.com/articles/s41598-023-35593-8
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