Number of the records: 1
Compensated telecentric F-Theta projection objective for micromachining applications at 257 nm
- 1.MRŇA, Libor, KOLAŘÍK, Vladimír, HOPP, J., HORÁK, S., STOKLASA, B., ÚLEHLA, L. Compensated telecentric F-Theta projection objective for micromachining applications at 257 nm. Ústav přístrojové techniky AV ČR, v. v. i., Meopta - optika, s.r.o., 2022. Functional Specimen APL-2022-38.
Number of the records: 1