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LIDT testing as a tool for optimization of processing window for D263 glass sheet TGV treatment
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SYSNO ASEP 0569382 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title LIDT testing as a tool for optimization of processing window for D263 glass sheet TGV treatment Author(s) Vanda, Jan (FZU-D) RID, ORCID
Mydlář, Martin (FZU-D)
Pilná, Kateřina (FZU-D)
Turčičová, Hana (FZU-D) RID, ORCID
Pobořil, Radek (FZU-D) ORCID
Brajer, Jan (FZU-D) ORCID
Mocek, Tomáš (FZU-D) RID, ORCID, SAI
Stoklasa, B. (CZ)
Venos, Š. (CZ)Number of authors 9 Article number 1230003 Source Title Laser-Induced Damage in Optical Materials 2022. - Bellingham : SPIE, 2022 / Carr C.W. ; Ristau D. ; Menoni C.S. - ISSN 0277-786X - ISBN 978-1-5106-5662-8 Number of pages 11 s. Publication form Online - E Action SPIE Laser Damage 2022 Event date 18.09.2022 - 22.09.2022 VEvent location New York Country US - United States Event type WRD Language eng - English Country US - United States Keywords TGV ; LIDT ; DPSSL ; laser ; ultra-short pulses Subject RIV BH - Optics, Masers, Lasers OECD category Optics (including laser optics and quantum optics) R&D Projects LO1602 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) TM01000021 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) LM2015086 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) EF15_006/0000674 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support FZU-D - RVO:68378271 UT WOS 000921048200002 EID SCOPUS 85148321312 DOI 10.1117/12.2642866 Annotation Laser-Induced Deep Etching (LIDE) is considered as the one of the most promising techniques for production of so-called TGVs (Through Glass Vias). In the production process, thin glass sheet is treated with ultra-short lasers pulses to induce surface and volume modification, allowing efficient wet etching and formation of through hole. Precise knowledge of damage threshold of such glass is essential when optimizing the whole process and scaling up the production via laser beam parallelization. In following paper, we present recent results on LIDT measurement of D263 glass sheets at wavelengths 1030 nm and 515 nm, effective utilization of such knowledge for setting up multi-Bessel beam processing optics, and we demonstrate resulting substrates with TGVs. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2023 Electronic address https://www.spiedigitallibrary.org/conference-proceedings-of-spie/12300/2642866/LIDT-testing-as-a-tool-for-optimization-of-processing-window/10.1117/12.2642866.short?SSO=1
Number of the records: 1