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High deposition rate films prepared by reactive HiPIMS
- 1.Mareš, P., Dubau, M., Polášek, J., Mates, T., Kozák, T., Vyskočil, J. High deposition rate films prepared by reactive HiPIMS. Vacuum. 2021, 191(Sep), 110329. ISSN 0042-207X. E-ISSN 1879-2715. Available: https://doi.org/10.1016/j.vacuum.2021.110329.
Number of the records: 1