Deformation of substrate by epitaxial piezoelectric film and implications for interferometry

0566722 - FZÚ 2024 RIV GB eng J - Journal Article
Yudin, Petr - Okamoto, K. - Yamada, T. - Tyunina, Marina
Deformation of substrate by epitaxial piezoelectric film and implications for interferometry.
International Journal of Solids and Structures. Roč. 262, Feb (2023), č. článku 112048. ISSN 0020-7683. E-ISSN 1879-2146
R&D Projects: GA ČR(CZ) GA21-09685S; GA ČR(CZ) GA22-10832S; GA MŠMT(CZ) EF16_019/0000760
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : film * piezoelectricity * DBLI * ferroelectric * strain * bending * bimorph * thermodynamics * polarization
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)
Impact factor: 3.6, year: 2022
Method of publishing: Limited access
https://doi.org/10.1016/j.ijsolstr.2022.112048

Advanced micro-and nano-electro-mechanical systems benefit from single-crystal-type epitaxial piezoelectric films, whose high crystal quality ensures excellent performance. Strong mechanical coupling in such films to non-piezoelectric substrates defines a difference in their operation with respect to purely piezoelectric counterparts. This is often described by a limiting case of a thick non-deformable substrate, whereas the film has out-of-plane deformations only. Here we consider a general practically relevant case, when converse piezoelectric effect in the film causes bending of the substrate. We provide a thermodynamic description and deliver analytical expressions for curvature, stress release, and thickness changes in a stack of the parallel-plate thin-film capacitor coherent to the substrate.
Permanent Link: https://hdl.handle.net/11104/0349499