Diamond cantilevers for MEMS sensor applications fabricated by laser ablation and optimized etching techniques

Number of the records: 1

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SYSNO	0564978
Title	Diamond cantilevers for MEMS sensor applications fabricated by laser ablation and optimized etching techniques
Author(s)	Zehetner, J. (AT) Vanko, G. (SK) Izsák, T. (SK) Kováčová, E. (SK) Držík, M. (SK) Dohnal, F. (AT) Kromka, Alexander (FZU-D)_{RID, ORCID, SAI}
Source Title	Proceedings of the 14th International Conference on Advanced Semiconductor Devices And Microsystems. S. 195-198. - New York : IEEE, 2022 / Marek J. ; Donoval D. ; Vavrinsky E.
Conference	International Conference on Advanced Semiconductor Devices And Microsystems - (ASDAM) /14./, 23.10.2022 - 26.10.2022, Smolenice
Document Type	Konferenční příspěvek (zahraniční konf.)
Grant	8X20035 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
Institutional support	FZU-D - RVO:68378271
Language	eng
Country	US
Keywords	laser processing * MEMS * cantilevers * diamond
Permanent Link	https://hdl.handle.net/11104/0336554

Number of the records: 1