Number of the records: 1  

Diamond cantilevers for MEMS sensor applications fabricated by laser ablation and optimized etching techniques

  1. 1.
    SYSNO ASEP0564978
    Document TypeC - Proceedings Paper (int. conf.)
    R&D Document TypeConference Paper
    TitleDiamond cantilevers for MEMS sensor applications fabricated by laser ablation and optimized etching techniques
    Author(s) Zehetner, J. (AT)
    Vanko, G. (SK)
    Izsák, T. (SK)
    Kováčová, E. (SK)
    Držík, M. (SK)
    Dohnal, F. (AT)
    Kromka, Alexander (FZU-D) RID, ORCID, SAI
    Number of authors7
    Source TitleProceedings of the 14th International Conference on Advanced Semiconductor Devices And Microsystems. - New York : IEEE, 2022 / Marek J. ; Donoval D. ; Vavrinsky E. - ISBN 978-1-6654-6977-7
    Pagess. 195-198
    Number of pages4 s.
    Publication formOnline - E
    ActionInternational Conference on Advanced Semiconductor Devices And Microsystems - (ASDAM) /14./
    Event date23.10.2022 - 26.10.2022
    VEvent locationSmolenice
    CountrySK - Slovakia
    Event typeWRD
    Languageeng - English
    CountryUS - United States
    Keywordslaser processing ; MEMS ; cantilevers ; diamond
    Subject RIVBM - Solid Matter Physics ; Magnetism
    OECD categoryMechanical engineering
    R&D Projects8X20035 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
    Institutional supportFZU-D - RVO:68378271
    EID SCOPUS85144595709
    DOI10.1109/ASDAM55965.2022.9966776
    AnnotationThe properties of diamond make it an attractive material for MEMS and sensor devices. We present the feasibility to fabricate membranes and cantilevers made of nano-(micro-) crystalline diamond films grown on Si/SiO2 substrates using microwave chemical vapour deposition (MWCVD). The patterning of micromechanical structures was performed by a combined process of femtosecond laser ablation and wet etching. We designed cantilever structures with varying lengths and widths (25, 50, 100, 200 and 300 µm). The cantilevers were made in a symmetric left- and right-hand configuration. An additional laser treatment was used to modify the mechanical properties of the left-hand cantilever. The deflection of the laser-treated, and non-treated sections was measured. The global mechanical system properties were simulated and corresponded with high accuracy to the measured results of deflection.
    WorkplaceInstitute of Physics
    ContactKristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
    Year of Publishing2023
Number of the records: 1  

  This site uses cookies to make them easier to browse. Learn more about how we use cookies.