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Diamond cantilevers for MEMS sensor applications fabricated by laser ablation and optimized etching techniques
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SYSNO ASEP 0564978 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Diamond cantilevers for MEMS sensor applications fabricated by laser ablation and optimized etching techniques Author(s) Zehetner, J. (AT)
Vanko, G. (SK)
Izsák, T. (SK)
Kováčová, E. (SK)
Držík, M. (SK)
Dohnal, F. (AT)
Kromka, Alexander (FZU-D) RID, ORCID, SAINumber of authors 7 Source Title Proceedings of the 14th International Conference on Advanced Semiconductor Devices And Microsystems. - New York : IEEE, 2022 / Marek J. ; Donoval D. ; Vavrinsky E. - ISBN 978-1-6654-6977-7 Pages s. 195-198 Number of pages 4 s. Publication form Online - E Action International Conference on Advanced Semiconductor Devices And Microsystems - (ASDAM) /14./ Event date 23.10.2022 - 26.10.2022 VEvent location Smolenice Country SK - Slovakia Event type WRD Language eng - English Country US - United States Keywords laser processing ; MEMS ; cantilevers ; diamond Subject RIV BM - Solid Matter Physics ; Magnetism OECD category Mechanical engineering R&D Projects 8X20035 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support FZU-D - RVO:68378271 EID SCOPUS 85144595709 DOI 10.1109/ASDAM55965.2022.9966776 Annotation The properties of diamond make it an attractive material for MEMS and sensor devices. We present the feasibility to fabricate membranes and cantilevers made of nano-(micro-) crystalline diamond films grown on Si/SiO2 substrates using microwave chemical vapour deposition (MWCVD). The patterning of micromechanical structures was performed by a combined process of femtosecond laser ablation and wet etching. We designed cantilever structures with varying lengths and widths (25, 50, 100, 200 and 300 µm). The cantilevers were made in a symmetric left- and right-hand configuration. An additional laser treatment was used to modify the mechanical properties of the left-hand cantilever. The deflection of the laser-treated, and non-treated sections was measured. The global mechanical system properties were simulated and corresponded with high accuracy to the measured results of deflection. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2023
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