Number of the records: 1
Diamond cantilevers for MEMS sensor applications fabricated by laser ablation and optimized etching techniques
- 1.Zehetner, J. - Vanko, G. - Izsák, T. - Kováčová, E. - Držík, M. - Dohnal, F. - Kromka, Alexander
Diamond cantilevers for MEMS sensor applications fabricated by laser ablation and optimized etching techniques.
Proceedings of the 14th International Conference on Advanced Semiconductor Devices And Microsystems. New York: IEEE, 2022 - (Marek, J.; Donoval, D.; Vavrinsky, E.), s. 195-198. ISBN 978-1-6654-6977-7.
[International Conference on Advanced Semiconductor Devices And Microsystems - (ASDAM) /14./. Smolenice (SK), 23.10.2022-26.10.2022]
OECD category: Mechanical engineering
https://hdl.handle.net/11104/0336554
Number of the records: 1