Number of the records: 1
Diamond cantilevers for MEMS sensor applications fabricated by laser ablation and optimized etching techniques
SYS 0564978 LBL 01000a^^22220027750^450 005 20230316110046.5 014 $a 85144595709 $2 SCOPUS 017 $a 10.1109/ASDAM55965.2022.9966776 $2 DOI 100 $a 20221205d m y slo 03 ba 101 $a eng $d eng 102 $a US 200 1-
$a Diamond cantilevers for MEMS sensor applications fabricated by laser ablation and optimized etching techniques 215 $a 4 s. $c E 463 -1
$1 001 cav_un_epca*0564981 $1 010 $a 978-1-6654-6977-7 $1 200 1 $a Proceedings of the 14th International Conference on Advanced Semiconductor Devices And Microsystems $v S. 195-198 $1 210 $a New York $c IEEE $d 2022 $1 702 1 $a Marek $b J. $4 340 $1 702 1 $a Donoval $b D. $4 340 $1 702 1 $a Vavrinsky $b E. $4 340 610 $a laser processing 610 $a MEMS 610 $a cantilevers 610 $a diamond 700 -1
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$3 cav_un_auth*0411900 $a Dohnal $b F. $y AT 701 -1
$3 cav_un_auth*0100328 $a Kromka $b Alexander $p FZU-D $i Polovodiče $j Semiconductors $w Optical Materials $T Fyzikální ústav AV ČR, v. v. i. 856 $9 RIV
Number of the records: 1