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Diamond cantilevers for MEMS sensor applications fabricated by laser ablation and optimized etching techniques
- 1.ZEHETNER, J., VANKO, G., IZSÁK, T., KOVÁČOVÁ, E., DRŽÍK, M., DOHNAL, F., KROMKA, A. Diamond cantilevers for MEMS sensor applications fabricated by laser ablation and optimized etching techniques. In: MAREK, J., DONOVAL, D., VAVRINSKY, E., eds. Proceedings of the 14th International Conference on Advanced Semiconductor Devices And Microsystems. New York: IEEE, 2022, s. 195-198. ISBN 978-1-6654-6977-7. Available: doi: 10.1109/ASDAM55965.2022.9966776
Number of the records: 1