Diamond cantilevers for MEMS sensor applications fabricated by laser ablation and optimized etching techniques

ZEHETNER, J., VANKO, G., IZSÁK, T., KOVÁČOVÁ, E., DRŽÍK, M., DOHNAL, F., KROMKA, Alexander. Diamond cantilevers for MEMS sensor applications fabricated by laser ablation and optimized etching techniques. In: MAREK, J., DONOVAL, D., VAVRINSKY, E., eds. Proceedings of the 14th International Conference on Advanced Semiconductor Devices And Microsystems. New York: IEEE, 2022, s. 195-198. ISBN 978-1-6654-6977-7. Available: doi: 10.1109/ASDAM55965.2022.9966776