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Effects of metal layers on chemical vapor deposition of diamond films
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SYSNO ASEP 0564910 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Effects of metal layers on chemical vapor deposition of diamond films Author(s) Izsák, T. (SK)
Vanko, G. (SK)
Babčenko, Oleg (FZU-D) ORCID
Zaťko, B. (SK)
Kromka, Alexander (FZU-D) RID, ORCID, SAINumber of authors 5 Source Title Journal of Electrical Engineering - Elektrotechnický časopis. - : Slovenská technická univerzita v Bratislave - ISSN 1335-3632
Roč. 73, č. 5 (2022), s. 350-354Number of pages 5 s. Language eng - English Country SK - Slovakia Keywords diamond ; CVD ; metallization ; iridium ; raman ; SEM Subject RIV BM - Solid Matter Physics ; Magnetism OECD category Electrical and electronic engineering R&D Projects LM2018110 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) LUASK22147 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Method of publishing Open access Institutional support FZU-D - RVO:68378271 UT WOS 000883793600007 EID SCOPUS 85143055399 DOI 10.2478/jee-2022-0047 Annotation Here, we present the influence of thin metal (Ni, Ir, Au) layers on diamond growth by MWCVD employing two different concepts. In the first concept, a flat substrate (GaN) was initially coated with a thin metal layer, then exposed to the MWCVD process. In the second concept, the diamond film was firstly formed, then it was overcoated with the metal layer and finally, once again exposed to the diamond MWCVD. It was confirmed that the Ni thin films (15 nm) hinder the formation of diamond crystals resulting in the formation of an amorphous carbon layer. Contrary to this finding, the Ir layer resulted in a successful overgrowth by the fully closed diamond film. However, by employing concept 2 (ie hybrid diamond/metal/diamond composite), the thin Ir layer was found to be unstable and transferred into the isolated clusters, which were overgrown by the diamond film. Using the Au/Ir (30/15 nm) bilayer system stabilized the metallization and no diamond growth was observed on the metal layer. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2023 Electronic address https://hdl.handle.net/11104/0336490
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