Silicon surface patterning by regular stripes of laser-induced periodic surface structures

0561604 - FZÚ 2023 RIV NL eng J - Journal Article
Sládek, Juraj - Levy, Yoann - Derrien, Thibault - Bryknar, Z. - Bulgakova, Nadezhda M.
Silicon surface patterning by regular stripes of laser-induced periodic surface structures.
Applied Surface Science. Roč. 605, Dec. (2022), č. článku 154664. ISSN 0169-4332. E-ISSN 1873-5584
R&D Projects: GA MŠMT EF15_003/0000445
Grant - others:OP VVV - BIATRI(XE) CZ.02.1.01/0.0/0.0/15_003/0000445
Institutional support: RVO:68378271
Keywords : femtosecond laser processing * laser beam scanning * low spatial frequency LIPSS * LSFL * laser-induced amorphization
OECD category: Optics (including laser optics and quantum optics)
Impact factor: 6.7, year: 2022
Method of publishing: Limited access
https://doi.org/10.1016/j.apsusc.2022.154664

Laser-induced periodic surface structures (LIPSS) formation on the surface of mono-crystalline silicon is reported for a specific fabrication regime of large-area structuring. Using a femtosecond laser at 1030 nm wavelength, a particular range of fluence and beam overlap in two-dimensional scanning scheme has been identified where LIPSS-covered areas organize into stripes perpendicular to the scanning direction. The stripes, where the LIPSS appear, are regularly spaced and located in between the centers of two subsequent Gaussian pulses while the regions receiving the peak pulse fluence are free of LIPSS. The formation of the LIPSS stripes is examined by analyzing local integrated fluence, N-on-1 pulse damage geometry and thresholds of modifications. Processes at play in the generation of such stripes of LIPSS are discussed and an explanation based on interpulse feedback from amorphized areas is proposed.
Permanent Link: https://hdl.handle.net/11104/0334181