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Method of low-temperature plasma generation, method of an electrically conductive or ferromagnetic tube coating using pulsed plasma and corresponding devices.
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SYSNO ASEP 0550970 Document Type P - Patent R&D Document Type Patent or other outcome protected by special legislation Title Method of low-temperature plasma generation, method of an electrically conductive or ferromagnetic tube coating using pulsed plasma and corresponding devices. Author(s) Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
Čada, Martin (FZU-D) RID, ORCID, SAI
Kšírová, Petra (FZU-D) RID, ORCID
Klinger, Miloslav (FZU-D) ORCIDNumber of authors 4 Year of issue 2021 Possible third party use of the result A - Pro využití výsledku jiným subjektem je vždy nutné nabytí licence Royalty requested A - Poskytovatel licence požaduje licenční poplatek Patent no. or utility model no. or industrial design no. EP3788181A1 Date of the patent acceptance 10.03.2021 Name of the patent owner Fyzikální ústav AV ČR, v. v. i Code of the issuer name NL001 - Netherlands Patent Office Rijswijk Current use A - Pouze udělený (dosud nevyužívaný) patent nebo patent využívaný jeho vlastníkem Language eng - English Keywords thin films ; hollow cathode discharge ; deposition ; RF plasma ; pulsed plasma ; hollow tube Subject RIV BL - Plasma and Gas Discharge Physics OECD category Coating and films R&D Projects EF16_019/0000760 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support FZU-D - RVO:68378271 Annotation The present EU patent (EP3788181A1) resides in the unifying idea of synchronizing a positive voltage pulse supplied to an electrically conductive or ferromagnetic tube and a exciting negative voltage pulse on a hollow cathode induced on the background of a high-frequency capacitive discharge. In one embodiment, the invention relates to a method of generating low-temperature plasma in a vacuum chamber comprising a hollow cathode and an electrode, the method comprising the step of igniting the pulsed DC discharge in the hollow cathode wherein the positive voltage pulse at least partially overlaps with the negative voltage pulse, and the positive voltage pulse at least partially overlaps with the negative voltage pulse on the hollow cathode.
Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2022 Electronic address https://worldwide.espacenet.com/patent/search/family/063713983/publication/EP3788181A1?q=EP3788181A1
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