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Effect of native oxide on the crystal orientation contrast in SEM micrographs obtained at hundreds, tens and units of eV
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SYSNO ASEP 0549396 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Effect of native oxide on the crystal orientation contrast in SEM micrographs obtained at hundreds, tens and units of eV Author(s) Mikmeková, Šárka (UPT-D) RID, SAI, ORCID
Aoyama, T. (JP)Number of authors 2 Article number 113144 Source Title Ultramicroscopy. - : Elsevier - ISSN 0304-3991
Roč. 220, January (2021)Number of pages 6 s. Publication form Print - P Language eng - English Country NL - Netherlands Keywords SLEEM ; Crystallographic contrast ; Low-energy electrons ; Mirror microscopy ; Work function ; Surface potential Subject RIV BM - Solid Matter Physics ; Magnetism OECD category Condensed matter physics (including formerly solid state physics, supercond.) R&D Projects TN01000008 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) Method of publishing Open access Institutional support UPT-D - RVO:68081731 UT WOS 000600833500006 EID SCOPUS 85093933635 DOI 10.1016/j.ultramic.2020.113144 Annotation This paper aims to elucidate the effect of native air-formed oxide on the crystallographic contrast between differently oriented copper grains in scanning electron microscope images obtained at energies from 0 eV up to 1 keV. The contrast between the Cu grains is strongly affected by the presence of native oxide. The crystallographic orientation contrast between the grains without covering the native oxide layer is relatively weak at hundreds of eV, negligible at tens of eV, and dramatically increases at energies below 10 eV. At extremely low landing energies, say below similar to 1 eV, the surface potential differences caused by work function variations between the differently oriented Cu grains affect the primary electrons, which enables us to obtain the micrographs with high crystallographic contrast. This contrast becomes surprisingly visible even if the grains are covered by a several nm thick native oxide layer. The presence of the native air-formed oxide layer on the Cu surface is inconsiderable for the contrast formation at energies close to the mirror conditions (< 1 eV). The surface potential differences originating in the substrate can affect the incident electrons through the native oxide film situated on the Cu surface. Scanning low-energy electron microscopy is a powerful tool for mapping local work function differences with a spatial resolution slightly better than 30 nm due to high sensitivity to local electrical potentials. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2022 Electronic address https://www.sciencedirect.com/science/article/pii/S0304399120302928?via%3Dihub
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