Compact differential plane interferometer with in-axis mirror tilt detection

Number of the records: 1

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SYSNO	0543086
Title	Compact differential plane interferometer with in-axis mirror tilt detection
Author(s)	Řeřucha, Šimon (UPT-D)_{RID, ORCID, SAI} Holá, Miroslava (UPT-D)_{RID, ORCID, SAI} Šarbort, Martin (UPT-D)_{RID, ORCID, SAI} Hrabina, Jan (UPT-D)_{RID, ORCID, SAI} Oulehla, Jindřich (UPT-D)_{RID, ORCID, SAI} Číp, Ondřej (UPT-D)_{RID, SAI, ORCID} Lazar, Josef (UPT-D)_{RID, ORCID, SAI}
Corespondence/senior	Řeřucha, Šimon - Korespondující autor
Source Title	Optics and Lasers in Engineering. Roč. 141, June (2021). - : Elsevier
Article number	106568
Document Type	Článek v odborném periodiku
Grant	FV10336 GA MPO - Ministry of Industry and Trade (MPO), CZ - Czech Republic
	TE01020233 GA TA ČR - Technology Agency of the Czech Republic (TA ČR)
	TN01000008 GA TA ČR - Technology Agency of the Czech Republic (TA ČR), CZ - Czech Republic
	ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
	EF16_026/0008460 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
	17IND03, XE - EU countries
Institutional support	UPT-D - RVO:68081731
Language	eng
Country	NL
Keywords	Laser interferometry * Optical metrology * Dimensional measurement * Common path interferometer * Differential interferometer * Tilt compensation
URL	https://www.sciencedirect.com/science/article/pii/S0143816621000385
Permanent Link	http://hdl.handle.net/11104/0320376

Number of the records: 1