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Surface form characterization of plane-parallel elements using frequency-tuned phase-shifting interferometry
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SYSNO ASEP 0541452 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Surface form characterization of plane-parallel elements using frequency-tuned phase-shifting interferometry Author(s) Kredba, J. (CZ)
Stašík, M. (CZ)
Mach, M. (CZ)
Matoušek, O. (CZ)
Karabyn, Vasyl (UFP-V) ORCIDNumber of authors 5 Article number 1149010 Source Title Proceedings of SPIE, 11490. - Bellingham : SPIE, 2020 - ISBN 978-1-5106-3787-0 Number of pages 7 s. Publication form Online - E Action Conference on Interferometry XX Event date 24.08.2020 - 04.09.2020 VEvent location ELECTR NETWORK Country US - United States Event type WRD Language eng - English Country US - United States Keywords DFB diodes ; Fourier transform ; Frequency-tuned interferometry ; Ghost fringes ; Phase-shifting interferometry ; Surface topography measurement Subject RIV BH - Optics, Masers, Lasers OECD category Optics (including laser optics and quantum optics) Institutional support UFP-V - RVO:61389021 UT WOS 000589987200023 EID SCOPUS 85092474825 DOI 10.1117/12.2568732 Annotation Plane-parallel optical elements, such as optical resonators, laser rods or wave plates, are widely used in many optical setups. Both planar surfaces of the element have to be manufactured with high precision in order to assure proper quality of the element and thus these surfaces have to be accurately measured. However, the interferometric measurement process, usually used for the surface form topography characterization, suffers from multiple interference patterns. This increases the total measurement error. In this paper the frequency-tuned interferometric method, that overcomes this problem, is demonstrated and compared to commonly used techniques using immersion liquid. Using a tunable laser source together with a frequency separation of the phase information from both surfaces, fringes from the first and second surface can be distinguished. Also, the interference between both surfaces can be used to obtain the wedge and thickness values of the specimen. Workplace Institute of Plasma Physics Contact Vladimíra Kebza, kebza@ipp.cas.cz, Tel.: 266 052 975 Year of Publishing 2022 Electronic address https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11490/2568732/Surface-form-characterization-of-plane-parallel-elements-using-frequency-tuned/10.1117/12.2568732.short?SSO=1
Number of the records: 1