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Surface form characterization of plane-parallel elements using frequency-tuned phase-shifting interferometry
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$a 10.1117/12.2568732 $2 DOI 100 $a 20210329d m y slo 03 ba 101 $a eng 102 $a US 200 1-
$a Surface form characterization of plane-parallel elements using frequency-tuned phase-shifting interferometry 215 $a 7 s. $c E 463 -1
$1 001 cav_un_epca*0541453 $1 010 $a 978-1-5106-3787-0 $1 200 1 $a Proceedings of SPIE $h 11490 $1 210 $a Bellingham $c SPIE $d 2020 608 $a Conference Paper 610 $a DFB diodes 610 $a Fourier transform 610 $a Frequency-tuned interferometry 610 $a Ghost fringes 610 $a Phase-shifting interferometry 610 $a Surface topography measurement 700 -1
$3 cav_un_auth*0363175 $a Kredba $b J. $y CZ $q Technická univerzita v Liberci 701 -1
$3 cav_un_auth*0419556 $a Stašík $b M. $y CZ $q Technická univerzita v Liberci 701 -1
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$3 cav_un_auth*0211484 $a Matoušek $b O. $y CZ $q Technická univerzita v Liberci 701 -1
$3 cav_un_auth*0361810 $a Karabyn $b Vasyl $p UFP-V $i TOPTEC $j TOPTEC $k TOPTEC $l TOPTEC $T Ústav fyziky plazmatu AV ČR, v. v. i. 856 $u https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11490/2568732/Surface-form-characterization-of-plane-parallel-elements-using-frequency-tuned/10.1117/12.2568732.short?SSO=1 $9 RIV
Number of the records: 1