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Surface form characterization of plane-parallel elements using frequency-tuned phase-shifting interferometry
- 1.KREDBA, J., STAŠÍK, M., MACH, M., MATOUŠEK, O., KARABYN, Vasyl. Surface form characterization of plane-parallel elements using frequency-tuned phase-shifting interferometry. In: Proceedings of SPIE. Vol. 11490. Bellingham: SPIE, 2020, č. článku 1149010. ISBN 978-1-5106-3787-0. Available: doi: 10.1117/12.2568732.
Number of the records: 1