Ion beam figuring with using Einzel lens

Number of the records: 1

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SYSNO	0536126
Title	Ion beam figuring with using Einzel lens
Author(s)	Karabyn, Vasyl (UFP-V) [TOPTEC]_ORCID Polák, Jaroslav (UFP-V) [TOPTEC]_RID Procháska, František (UFP-V) [TOPTEC]_RID Melich, Radek (UFP-V) [TOPTEC]_RID
Source Title	SPIE: Optics and Measurement 2019 International Conference. Roč. 11385 (2019). - Bellingham : SPIE, 2019
Conference	Optics and Measurement International Conference, 08.10.2019 - 10.10.2019, Liberec
Article number	1138508
Document Type	Konferenční příspěvek (zahraniční konf.)
Institutional support	UFP-V - RVO:61389021
Language	eng
Country	US
Keywords	Dwell-time correction * Einzel lens * focused ion beam * ion beam figuring
URL	https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11385/2542822/Ion-beam-figuring-with-using-Einzel-lens/10.1117/12.2542822.short
Permanent Link	http://hdl.handle.net/11104/0313951

Number of the records: 1