Synthesis and surface modification of light emitting silicon nanoparticles using non-thermal plasma techniques

0532634 - FZÚ 2021 RIV FR eng J - Journal Article
Müller, Martin - Galář, Pavel - Stuchlík, Jiří - Kočka, Jan - Kupka, J. - Kůsová, Kateřina
Synthesis and surface modification of light emitting silicon nanoparticles using non-thermal plasma techniques.
European Physical Journal-Applied Physics. Roč. 89, č. 2 (2020), s. 1-6, č. článku 20401. ISSN 1286-0042. E-ISSN 1286-0050
R&D Projects: GA ČR(CZ) GA18-05552S
Institutional support: RVO:68378271
Keywords : silicon nanocrystals * PECVD * photoluminescence
OECD category: Condensed matter physics (including formerly solid state physics, supercond.)
Impact factor: 0.993, year: 2020
Method of publishing: Limited access
https://doi.org/10.1051/epjap/2020190263

We have synthesised silicon nanoparticles (Si-NPs) with photoluminescence ranging from blue to IR spectral region using a low-pressure RF plasma in a flow-through glass tube reactor. The spectral position of photoluminescence band of Si-NPs is controlled by the synthesis parameters such as plasma power, silane and hydrogen concentration and pressure in the working area. Modification of Si-NPs surface both on air after the synthesis and in the vacuum chamber by second plasma in methylsilane atmosphere causes a blue spectral shift of the photoluminescence band.
Permanent Link: http://hdl.handle.net/11104/0311531