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Effect of irradiation conditions by swift heavy ions on the microstructure and composition of PMMA

  1. 1.
    SYSNO0518743
    TitleEffect of irradiation conditions by swift heavy ions on the microstructure and composition of PMMA
    Author(s) Romanenko, Oleksandr V. (UJF-V) [ONF] ORCID, SAI
    Havránek, Vladimír (UJF-V) [ONF] RID, SAI, ORCID
    Malinský, Petr (UJF-V) [ONF] RID, ORCID, SAI
    Slepička, P. (CZ)
    Stammers, James H. (UJF-V) [ONF]
    Švorčík, V. (CZ)
    Macková, Anna (UJF-V) [ONF] RID, ORCID, SAI
    Fajstavr, D. (CZ)
    Source Title Nuclear Instruments & Methods in Physics Research Section B. Roč. 461, č. 12 (2019), s. 175-180. - : Elsevier
    Document TypeČlánek v odborném periodiku
    Grant EF16_013/0001812 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
    LM2015056 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
    GA19-02482S GA ČR - Czech Science Foundation (CSF)
    Institutional supportUJF-V - RVO:61389005
    Languageeng
    CountryNL
    Keywords heavy ion beam lithography * PMMA film * microstructuring * shrinkage * swelling
    Cooperating institutions Univerzita Jana Evangelisty Purkyně v Ústí nad Labem (Czech Republic)
    Vysoká škola chemicko-technologická v Praze (Czech Republic)
    URLhttps://doi.org/10.1016/j.nimb.2019.09.043
    Permanent Linkhttp://hdl.handle.net/11104/0303804
     
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