Number of the records: 1
Effect of irradiation conditions by swift heavy ions on the microstructure and composition of PMMA
- 1.
SYSNO ASEP 0518743 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Effect of irradiation conditions by swift heavy ions on the microstructure and composition of PMMA Author(s) Romanenko, Oleksandr V. (UJF-V) ORCID, SAI
Havránek, Vladimír (UJF-V) RID, SAI, ORCID
Malinský, Petr (UJF-V) RID, ORCID, SAI
Slepička, P. (CZ)
Stammers, James H. (UJF-V)
Švorčík, V. (CZ)
Macková, Anna (UJF-V) RID, ORCID, SAI
Fajstavr, D. (CZ)Number of authors 8 Source Title Nuclear Instruments & Methods in Physics Research Section B. - : Elsevier - ISSN 0168-583X
Roč. 461, č. 12 (2019), s. 175-180Number of pages 6 s. Publication form Print - P Language eng - English Country NL - Netherlands Keywords heavy ion beam lithography ; PMMA film ; microstructuring ; shrinkage ; swelling Subject RIV BG - Nuclear, Atomic and Molecular Physics, Colliders OECD category Atomic, molecular and chemical physics (physics of atoms and molecules including collision, interaction with radiation, magnetic resonances, Mössbauer effect) R&D Projects EF16_013/0001812 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) LM2015056 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) GA19-02482S GA ČR - Czech Science Foundation (CSF) Method of publishing Limited access Institutional support UJF-V - RVO:61389005 UT WOS 000501391200032 EID SCOPUS 85072937886 DOI 10.1016/j.nimb.2019.09.043 Annotation Our research is devoted to the shrinkage and swelling of PMMA film after micro-structuring with ion beam lithography. 10 MeV O4+ ions were used in the experiment. Parallel lines of 1 mm in length and 10 mu m in thickness were created. The number of scan cycles and ion fluence were varied. The influence of the irradiation regime on PMMA elemental composition in micro-structured parts and microstructure morphology were studied. It was shown that microstructures created in PMMA film undergo both shrinkage and swelling processes depending on both the scan speed and the fluence. For the same fluence, shrinkage appears at fast scan speeds and swelling at slow ones. The same phenomenon was found in relation to the fluence for the same scan speed. It was observed that PMMA film rupture caused by irradiation occurred prior to the start of the carbonization of the irradiated area. Workplace Nuclear Physics Institute Contact Markéta Sommerová, sommerova@ujf.cas.cz, Tel.: 266 173 228 Year of Publishing 2020 Electronic address https://doi.org/10.1016/j.nimb.2019.09.043
Number of the records: 1