Modified high frequency probe approach for diagnostics of highly reactive plasma

0518124 - FZÚ 2021 RIV GB eng J - Journal Article
Sezemský, P. - Straňák, V. - Kratochvíl, J. - Čada, Martin - Hippler, R. - Hrabovský, M. - Hubička, Zdeněk
Modified high frequency probe approach for diagnostics of highly reactive plasma.
Plasma Sources Science & Technology. Roč. 28, č. 11 (2019), s. 1-10, č. článku 115009. ISSN 0963-0252. E-ISSN 1361-6595
R&D Projects: GA MPO FV20580
Institutional support: RVO:68378271
Keywords : rf Sobolewski probe * probe measurement in reactive plasma * C₂H₂ discharge
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 3.193, year: 2019
Method of publishing: Limited access
https://doi.org/10.1088/1361-6595/ab506c

The paper introduces a modified approach of time resolved in situ diagnostics of highly reactive discharges (C2H2 in our case) usually used for a deposition process of various non-conductive thin films. Reactive plasma could create an insulating film onto inserted diagnostic tools, which distorts measured data and makes their processing unreliable, a typical problem of Langmuir probe measurements. The proposed approach utilizes a so-called radiofrequency (rf) Sobolewski probe for ion flux measurement which is further modified to also obtain the electron temperature in some cases and the ion density. In this work, we introduce the procedure where measured rf probe characteristics are transformed towards I–V curves of the plasma sheath with subtracted capacitive current.
Permanent Link: http://hdl.handle.net/11104/0303302