Functional nano–structuring of thin silicon nitride membranes

Number of the records: 1

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SYSNO	0512017
Title	Functional nano–structuring of thin silicon nitride membranes
Author(s)	Matějka, Milan (UPT-D)_{RID, ORCID, SAI} Krátký, Stanislav (UPT-D)_{RID, ORCID, SAI} Řiháček, Tomáš (UPT-D)_{RID, ORCID} Knápek, Alexandr (UPT-D)_{RID, ORCID, SAI} Kolařík, Vladimír (UPT-D)_{RID, ORCID, SAI}
Source Title	5th IMAPS Flash Conference. Book of Abstracts. S. 74-75. - Brno : University of Technology, 2019
Conference	International Microelectronics Assembly and Packaging Society Flash Conference /5./. IMAPS, 24.10.2019 - 25.10.2019, Brno
Document Type	Abstrakt
Institutional support	UPT-D - RVO:68081731
Language	eng
Country	CZ
Permanent Link	http://hdl.handle.net/11104/0302234

Number of the records: 1