Synthesis and characterization of nanostructured molybdenum oxynitride films fabricated by sub-atmospheric chemical vapor deposition.

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SYSNO	0507800
Title	Synthesis and characterization of nanostructured molybdenum oxynitride films fabricated by sub-atmospheric chemical vapor deposition.
Author(s)	Dřínek, Vladislav (UCHP-M)_{RID, ORCID, SAI} Klementová, Mariana (FZU-D)_{RID, ORCID} Palatinus, Lukáš (FZU-D)_{RID, ORCID, RID} Dytrych, Pavel (UCHP-M)_{RID, ORCID, SAI} Fajgar, Radek (UCHP-M)_{RID, ORCID, SAI} Jandová, Věra (UCHP-M)_{RID, ORCID, SAI} Koštejn, Martin (UCHP-M)_{RID, SAI, ORCID} Kupčík, Jaroslav (UCHP-M)_{RID, ORCID, SAI}
Corespondence/senior	Dřínek, Vladislav - Korespondující autor
Source Title	Journal of Alloys and Compounds. Roč. 808, NOV 5 (2019). - : Elsevier
Article number	151470
Document Type	Článek v odborném periodiku
Grant	StrategieAV21/3, CZ - Czech Republic
	EF16_019/0000760 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic
	CZ.02.1.01/0.0/0.0/16_019/0000760, XE - EU countries
Institutional support	UCHP-M - RVO:67985858 ; FZU-D - RVO:68378271
Language	eng
Country	NL
Keywords	nanostructured materials * nitride materials * photoelectron microscopies * vapor deposition
URL	http://hdl.handle.net/11104/0301847
Permanent Link	http://hdl.handle.net/11104/0301847

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Number of the records: 1