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Laser system for measuring MEMS relief created by the method of deep reactive ion etching
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SYSNO ASEP 0498736 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Laser system for measuring MEMS relief created by the method of deep reactive ion etching Author(s) Maňka, Tadeáš (UPT-D) RID, ORCID, SAI
Šerý, Mojmír (UPT-D) RID, SAI
Krátký, Stanislav (UPT-D) RID, ORCID, SAI
Zemánek, Pavel (UPT-D) RID, SAI, ORCIDNumber of authors 4 Article number 109760M Source Title 21st Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics. (Proceedings of SPIE 10976). - Bellingham : SPIE, 2018 / Zemánek Pavel - ISSN 0277-786X - ISBN 9781510626072 Number of pages 7 s. Publication form Print - P Action Czech-Polish-Slovak Optical Conference on Wave and Quantum Aspects of Contemporary Optics /21./ Event date 03.09.2018 - 07.09.2018 VEvent location Lednice Country CZ - Czech Republic Event type EUR Language eng - English Country US - United States Keywords laser interferometry ; DRIE ; MEMS ; depth measuring Subject RIV BH - Optics, Masers, Lasers OECD category Optics (including laser optics and quantum optics) R&D Projects LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support UPT-D - RVO:68081731 UT WOS 000455324600021 EID SCOPUS 85059391006 DOI 10.1117/12.2518098 Annotation The method of laser interferometry is presented appropriate for precise determination of the depth of etching in a deepreactive ion etching system (DRIE), primarily used for the manufacturing of micro-electro-mechanical systems (MEMS). The system uses previous interferometer designs developed at the Institute of Institute of Scientific Instruments of the CAS, v. v. i. (ISI). We designed and manufactured a measurement system for specific MEMS and its functionality verified with the KLATencor D-120 profilometer. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2019
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