Number of the records: 1
Towards high quality ITO coatings: the impact of nitrogen admixture in HiPIMS discharges
- 1.0489659 - FZÚ 2019 RIV CH eng J - Journal Article
Straňák, V. - Bogdanowicz, R. - Sezemsky, P. - Wulff, H. - Kruth, A. - Smietana, M. - Kratochvíl, J. - Čada, Martin - Hubička, Zdeněk
Towards high quality ITO coatings: the impact of nitrogen admixture in HiPIMS discharges.
Surface and Coatings Technology. Roč. 335, Feb (2018), s. 126-133. ISSN 0257-8972
Institutional support: RVO:68378271
Keywords : film properties * HiPIMS * ITO * plasma deposition
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 3.192, year: 2018
Permanent Link: http://hdl.handle.net/11104/0284031
Number of the records: 1