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Multitarget sputtering of PZT-containing mixed oxide thin films onto copper-coated kapton substrates
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SYSNO 0486358 Title Multitarget sputtering of PZT-containing mixed oxide thin films onto copper-coated kapton substrates Author(s) Kleiner, A. (DE)
Suchaneck, G. (DE)
Dejneka, Alexandr (FZU-D) RID, ORCID
Jastrabík, Lubomír (FZU-D) RID, ORCID
Lavrentev, Vasyl (FZU-D)
Kiselev, D.A. (RU)
Gerlach, G. (DE)Source Title Proceedings of International Conference On Oxide Materials For Electronic Engineering (OMEE). S. 19-20. - New York : IEEE, 2014 / Shpotyuk M.V. Conference 2014 IEEE International Conference On Oxide Materials For Electronic Engineering (OMEE), 26.05.2014 - 30.05.2014, Lviv Article number 6912320 Document Type Konferenční příspěvek (zahraniční konf.) Institutional support FZU-D - RVO:68378271 Language eng Country US Keywords complex oxide film deposition * multitarget reactive sputtering * flexible polymer substrate * composition profile * piezoresponse force microscopy * PZT URL http://ieeexplore.ieee.org/document/6912320/ Permanent Link http://hdl.handle.net/11104/0281194
Number of the records: 1