Number of the records: 1
Multitarget sputtering of PZT-containing mixed oxide thin films onto copper-coated kapton substrates
- 1.
SYSNO ASEP 0486358 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Multitarget sputtering of PZT-containing mixed oxide thin films onto copper-coated kapton substrates Author(s) Kleiner, A. (DE)
Suchaneck, G. (DE)
Dejneka, Alexandr (FZU-D) RID, ORCID
Jastrabík, Lubomír (FZU-D) RID, ORCID
Lavrentev, Vasyl (FZU-D)
Kiselev, D.A. (RU)
Gerlach, G. (DE)Number of authors 7 Article number 6912320 Source Title Proceedings of International Conference On Oxide Materials For Electronic Engineering (OMEE). - New York : IEEE, 2014 / Shpotyuk M.V. - ISBN 978-1-4799-5961-7 Pages s. 19-20 Number of pages 2 s. Publication form Online - E Action 2014 IEEE International Conference On Oxide Materials For Electronic Engineering (OMEE) Event date 26.05.2014 - 30.05.2014 VEvent location Lviv Country UA - Ukraine Event type EUR Language eng - English Country US - United States Keywords complex oxide film deposition ; multitarget reactive sputtering ; flexible polymer substrate ; composition profile ; piezoresponse force microscopy ; PZT Subject RIV BL - Plasma and Gas Discharge Physics OECD category Fluids and plasma physics (including surface physics) Institutional support FZU-D - RVO:68378271 UT WOS 000363330400002 EID SCOPUS 84908665137 DOI 10.1109/OMEE.2014.6912320 Annotation Large area film deposition was performed by means of multitarget reactive magnetron sputtering from 200 mm diameter metallic targets (Pb, Ti, Zr) onto Cu-coated Kapton HN substrates. High-power pulse sputtering has been employed for the Zr-target (or alternatively for the Ti-target). Film composition profiles were evaluated by XPS and RES. Piezoelectric properties were investigated by PFM. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2018
Number of the records: 1