Number of the records: 1
Multitarget sputtering of PZT-containing mixed oxide thin films onto copper-coated kapton substrates
SYS 0486358 LBL 01000a^^22220027750^450 005 20240103215552.5 014 $a 84908665137 $2 SCOPUS 014 $a 000363330400002 $2 WOS 017 $a 10.1109/OMEE.2014.6912320 $2 DOI 100 $a 20180207d m y slo 03 ba 101 $a eng 102 $a US 200 1-
$a Multitarget sputtering of PZT-containing mixed oxide thin films onto copper-coated kapton substrates 215 $a 2 s. $c E 463 -1
$1 001 cav_un_epca*0486197 $1 010 $a 978-1-4799-5961-7 $1 200 1 $a Proceedings of International Conference On Oxide Materials For Electronic Engineering (OMEE) $v S. 19-20 $1 210 $a New York $c IEEE $d 2014 $1 702 1 $a Shpotyuk $b M.V. $4 340 610 $a complex oxide film deposition 610 $a multitarget reactive sputtering 610 $a flexible polymer substrate 610 $a composition profile 610 $a piezoresponse force microscopy 610 $a PZT 700 -1
$3 cav_un_auth*0290326 $a Kleiner $b A. $y DE 701 -1
$3 cav_un_auth*0015926 $a Suchaneck $b G. $y DE 701 -1
$3 cav_un_auth*0255904 $a Dejneka $b Alexandr $i Optické a biofyzikální systémy $j Optical and Biophysical Systems $p FZU-D $w Optical and Biophysical Systems $T Fyzikální ústav AV ČR, v. v. i. 701 -1
$3 cav_un_auth*0100259 $a Jastrabík $b Lubomír $i Nízkoteplotní plazma $j Low-Temperature Plasma $p FZU-D $w Low-Temperature Plasma $T Fyzikální ústav AV ČR, v. v. i. 701 -1
$3 cav_un_auth*0358046 $a Lavrentev $b Vasyl $i Optické a biofyzikální systémy $j Optical and Biophysical Systems $p FZU-D $T Fyzikální ústav AV ČR, v. v. i. 701 -1
$3 cav_un_auth*0322187 $a Kiselev $b D.A. $y RU 701 -1
$3 cav_un_auth*0016601 $a Gerlach $b G. $y DE 856 $u http://ieeexplore.ieee.org/document/6912320/
Number of the records: 1