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Controlled structuring of self-assembled polystyrene microsphere arrays by two different plasma systems
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SYSNO ASEP 0486284 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Controlled structuring of self-assembled polystyrene microsphere arrays by two different plasma systems Author(s) Domonkos, Mária (FZU-D) RID
Ižák, Tibor (FZU-D) RID
Stolcova, L. (CZ)
Proška, J. (CZ)
Kromka, Alexander (FZU-D) RID, ORCID, SAINumber of authors 5 Source Title NANOCON 2013 - 5th International Conference Proceedings. - Ostrava : TANGER Ltd, 2014 - ISBN 978-80-87294-47-5 Pages s. 34-38 Number of pages 5 s. Publication form Online - E Action 5th International Conference Nanocon 2013 Event date 16.10.2013 - 18.10.2013 VEvent location Brno Country CZ - Czech Republic Event type WRD Language eng - English Country CZ - Czech Republic Keywords nanosphere lithography ; reactive ion etching ; pulsed linear-antenna microwave plasma ; polystyrene microspheres ; Langmuir-Blodgett monolayers Subject RIV BM - Solid Matter Physics ; Magnetism OECD category Condensed matter physics (including formerly solid state physics, supercond.) R&D Projects GAP108/12/0910 GA ČR - Czech Science Foundation (CSF) Institutional support FZU-D - RVO:68378271 UT WOS 000352070900004 EID SCOPUS 84929428386 Annotation In this study we present a successful manipulation of microspheres by reactive ion etching (RIE). A self-assembled monolayer close-packed array of monodisperse polystyrene microspheres (PM) with diameter of 471 nm was used as the primary template. The PM templates were processed in two different RIE systems: (i) capacitively coupled radiofrequency plasma (CCP) and (ii) dual plasma system which combines CCP and pulsed linear-antenna microwave plasma (PLAMWP). The influence of process conditions on the PM geometry was systematically studied by scanning electron microscopy (SEM). It was found out that choosing optimal parameters results in a tunable diameter of PM with various shapes (from spheres to pyramid-like structures) while keeping their periodic hexagonal ordering. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2019
Number of the records: 1