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The deposition of amorphous and amorphous hydrogenated silicon with embedded cubic Mg.sub.2./sub.Si nanoparticles
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SYSNO 0486272 Title The deposition of amorphous and amorphous hydrogenated silicon with embedded cubic Mg2Si nanoparticles Author(s) Stuchlíková, The-Ha (FZU-D) RID, ORCID
Stuchlík, Jiří (FZU-D) RID, ORCID
Remeš, Zdeněk (FZU-D) RID, ORCID
Fajgar, Radek (UCHP-M) RID, ORCID, SAI
Galkin, N.G. (RU)
Galkin, K.N. (RU)
Chernev, I.M. (RU)Source Title NANOCON 2013 - 5th International Conference Proceedings. S. 145-150. - Ostrava : TANGER Ltd, 2014 Conference 5th International Conference Nanocon 2013, 16.10.2013 - 18.10.2013, Brno Document Type Konferenční příspěvek (zahraniční konf.) Institutional support FZU-D - RVO:68378271 ; UCHP-M - RVO:67985858 Language eng Country CZ Keywords Mg2Si nanoparticles * a-Si/a-Si:H matrix * RDA * PECVD * RLA Permanent Link http://hdl.handle.net/11104/0281141
Number of the records: 1